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Tender Details
- Country: Italy
- Summary: System for the Removal of Rie Type Plasma Materials Reactive Ion Etching
- ITT Ref No: 92500762
- Deadline: 10 Dec 2023
- Competition: ICB
- Financier: Self Financed
- Purchaser Ownership: Public
- Tender Value: 850000.00
- Notice Type: Tender
- Document Ref. No.: 706104-2023
- Purchaser's Detail :
- Description :
- SUPPLY, INSTALLATION AND COMMISSIONING OF A PLASMA ETCHING SYSTEM FOR THE REMOVAL IN PLASMA OF OXIDES, OXY-NITURES AND NITURES OF SILICON, POLY-SILICON, DOPPED ON PRODUCTION BATCHES OF 25 WAFERS OF 150 MM SUBSTRATES PREPARED TO TREAT SUBSTRATES DA 200 MM.
Doc Title: Research, texts8965740e25c5159704771322c83775d6ng and scientific technical simulator
Contract Type: Supplies - Documents :
Purchaser : INSTITUTE OF PHOTONICS AND NANOTECHNOLOGIES OF THE CNR
Address: 18
Town: Trento
NUTS-Code: ITH20 - Trento
Postal Code: 38128
Contact Point: ALESSANDRA BROCCA
Phone: 39 0223996281
Email :alessandra.brocca@ifn.cnr.it
URL :www.cnr.it
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